The analysis of most semiconductor devices includes the calculation of the electrostatic potential within the device as a function of the existing charge distribution. Electromagnetic theory and more specifically electrostatic theory are used to obtain the potential. A short description of the necessary tools, namely Gauss's law and Poisson's equation, is provided below. |
1.3.1 Gauss's law | ![]() ![]() ![]() ![]() ![]() |
Gauss's law is one of Maxwell's equations (Appendix 10) and provides the relation between the charge density, ρ, and the electric field, |
![]() | (1.3.1) |
This equation can be integrated to yield the electric field for a given one-dimensional charge distribution: |
![]() | (1.3.2) |
Gauss's law as applied to a three-dimensional charge distribution relates the divergence of the electric field to the charge density: |
![]() | (1.3.3) |
This equation can be simplified if the field is constant and normal to each point of a closed surface, A, while enclosing a charge Q, yielding: |
![]() | (1.3.4) |
Example 1.4![]() ![]() | Consider an infinitely long cylinder with charge density, ρ, dielectric constant, ε0 and radius, r0. What is the electric field in and around the cylinder? |
Solution | Because of the cylinder symmetry, one expects the electric field to be only dependent on the radius, r. Applying Gauss's law, equation (1.3.4), one finds: and where a cylinder with length L was chosen to define the surface A, and edge effects were ignored. The electric field then equals: The electric field therefore increases within the cylinder with increasing radius as shown in the figure below. The electric field decreases outside the cylinder.
|
1.3.2 Poisson's equation | ![]() ![]() ![]() ![]() ![]() |
The electric field is defined as minus the gradient of the electrostatic potential, φ, or, in one dimension, as minus the derivative of the electrostatic potential: |
![]() | (1.3.5) |
The electric field vector therefore originates at a point of higher potential and points towards a point of lower potential. |
The potential can be obtained by integrating the electric field as described by: |
![]() | (1.3.6) |
At times, it is convenient to link the charge density to the potential by combining equation (1.3.5) with Gauss's law in the form of equation (1.3.1), yielding: |
![]() | (1.3.7) |
which is referred to as Poisson's equation. |
For a three-dimensional field distribution, the gradient of the potential is described by: |
![]() | (1.3.8) |
and can be combined with Gauss's law as formulated with equation (1.3.3), yielding a more general form of Poisson's equation: |
![]() | (1.3.9) |